Microelectronic machining technology, including bulk micromachining technology, surface micromachining technology, LIGA technology (X-ray deep lithography, micro-electroforming and micro-replication technology), laser micro-machining technology and micro-packaging technology. The development of MEMS has raised the level of miniaturization, intelligence, multi-function and reliability of sensors to new heights. Sensor detection instrument, based on microelectronic technology, built-in microprocessor, or micro-sensor and microprocessor and related integrated circuits (operational amplifier, A/D or D/A, memory, network communication interface circuit) Encapsulation together completes digitization, intelligence, networking, and systemization. (Note: MEMS technology has also completed products such as micro-motors or actuators, which will be introduced in another article.) In terms of networking, it mainly refers to the use of multiple fieldbuses and Ethernet (Internet), which should be selected according to the characteristics of various industries. One or more of them, the most popular in recent years are FF, Profibus, CAN, Lonworks, AS-Interbus, TCP/IP, and so on.
In addition to MEMS, the development of new sensors relies on new sensitive materials, sensitive components and nanotechnology, such as next-generation fiber optic sensors, superconducting sensors, focal plane display infrared detectors, biosensors, nanosensors, new quantum sensors, microgyros , networked sensors, smart sensors, fuzzy sensors, multi-function sensors, etc.
Multi-sensor data fusion technology is forming a hot spot. It was formed in the 1980s. It is different from general signal processing and different from monitoring and measurement of single or multiple sensors, but based on the measurement results based on multiple sensors. A high-level integrated decision-making process. In view of the miniaturization and intelligentization of sensor technology, on the basis of information acquisition, multiple functions are further integrated to integrate, which is an inevitable trend. Multi-sensor data fusion technology also promotes the development of sensor technology. The definition of multi-sensor data fusion is summarized: the local data resources provided by multiple similar or different types of sensors distributed in different locations are integrated, and analyzed by computer technology to eliminate the possible redundancy between multi-sensor information. Contradictions, complement each other, reduce their uncertainty, obtain consistent interpretation and description of the object under test, thereby improving the speed and correctness of system decision-making, planning, and response, so that the system can obtain more complete information. Its information fusion appears at different information levels, including data layer (pixel layer) fusion, feature layer fusion, and decision layer (evidence layer) fusion. Because it has the following advantages over single sensor information, namely fault tolerance, complementarity, real-time and economy, it is gradually popularized and applied. In addition to military applications, the application field has been applied to automation technology, robotics, marine surveillance, seismic observation, construction, air traffic control, medical diagnosis, remote sensing technology and so on.
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